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5000c

▪ LED Chip process Monitoring & Inspection
▪ Using Linescan camera, High Speed / High Precision inspection is available.
▪ Available for Large Chip, Vertical Type Chip and Pieces of Wafer.
▪ Inspection Item
   - Pad defect, Epitaxial Defect, Finger defect, ITO defect,
   - Mesa Line, Double chip, etc.