Auto Scope System
- Auto Focus
- 2 types of review mode(Direct, Manual)
- Image Saving
- CD Measurement
- Overlay
- KLARF / MAP file Automation
- Overkill Review
- Camera : Color Verification 1M Area Camera
- Scope : 5X, 10X, 20X, 50X, 100X, 150X
- Repeatability : 1um@3σ
