Wafer Macro Inspection System

- Higher Resolution Optics
- Color Macro Inspection
- 4 Objective Lenses
- NAC(Numerical Aperture Controller
- Backside Inspection with IR
- Color Backside Inspection
- PBI(Post Bonding Inspection)
- Enhanced 3D Optic
- Edge Inspection
- EBR Measurement
- Full Area Inspection on Wafer


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